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		<title>(DUV) on Warm IR Gold Coating Heaters</title>
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				<title>Deep UV (DUV) resist bake lamp</title>
				<link>http://warm-ir-gold-heater.com/en/posts/deep-uv-duv-resist-bake-lamp/</link>
				<pubDate>Thu, 25 Jun 2026 01:46:16 +0800</pubDate>
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				<description>&lt;p&gt;&lt;img src=&#34;http://warm-ir-gold-heater.com/images/016cf4f616aaa15e4af48856b8adc51b.png&#34; alt=&#34;Deep UV (DUV) resist bake lamp&#34;&gt;&lt;/p&gt;&#xA;&lt;p&gt;On the lithography floor, a 0.2°C drift during soft bake isn&amp;rsquo;t a footnote—it&amp;rsquo;s a yield hit. DUV photoresist locks in its critical dimensions in the first minutes of thermal conditioning, and the bake step controls solvent removal, film stress, and edge bead. When thermal uniformity slips, you get bridged features, scum lines, and CD excursions that can &lt;a href=&#34;https://o-yate.com&#34;&gt;scrap&lt;/a&gt; entire lots.&lt;/p&gt;</description>
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